Effects of Depositing Temperature and Film Thickness on Residual Stress of TiN Coated Materials.
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Journal of the Society of Materials Science, Japan
سال: 1995
ISSN: 1880-7488,0514-5163
DOI: 10.2472/jsms.44.1121